Abstract: Abstract: The ultra-precision processing of electronic information materials is of great significance for the development of modern agricultural equipment from mechanization to automation, digitization and intelligence. To improve the efficiency of traditional fluid polishing which has a wide range of adaptability, a three-phase abrasive flow based on venturi structure cavitation-assiste polishing method was proposed, and the theoretical analysis and experimental research were conducted at the same time. The 2 different cases, with and without cavitation in three-phased abrasive flow, were numerically analyzed by computational fluid dynamics. Firstly, the three-phase abrasive flow machining model and machining mechanism based on cavitation-assisted were introduced. Then the flow field based multi-phased flow mixing model and the Realizable k-ε turbulence model was applied to couple the cavitation and the flow field model. The analysis and comparison of the key parameters, like velocity vector, dynamic pressure, and turbulent kinetic energy in the flow field were completed. In order to validate the numerical simulation and the proposed method, on the one hand, the PIV (particle image velocimetry) observation experiment was conducted to observe and analyze the evolution of cavitation clouds in the flow field, and the cavitation-assisted polishing mechanism was further analyzed. On the other hand, the surface roughness and surface topography of the workpiece were measured and analyzed through a three-phased abrasive flow cavitation polishing experiment. The theoretical and experimental results showed that the flow velocity, dynamic pressure, turbulent kinetic energy and effective machining area under the assistance of cavitation were obviously increased. The numerical analysis results were aligned with the PIV observation and the polishing experiment results. The processing mechanism of the cavitation assisted polishing method for gas-liquid-solid three-phase abrasive is that the cavitation impact caused by cavitation bubbles collapse increase the effective impact of abrasive particles on the surface of the workpiece in the flow field. Further, the movement of the abrasive particles tends to be disordered state, thus achieving the goal of improving the processing efficiency and ensuring the processing quality significantly. The processing comparison experiments showed that the polishing time of cavitation-assisted abrasive flow could be obviously shortened, and the workpiece surface roughness could be reduced from 160 nm to 4.95 nm after 12 h polishing, whereas the non-cavitation assisted abrasive flow polishing can only be reduced to 7.23 nm. In addition, the surface morphology of cavitation-assisted abrasive flow machining is better.