Influence of shapes of grooved polishing tool on hydrodynamic suspension polishing

To study the influence of polishing tool shape on the hydrodynamic suspension polishing, Simulation and experimental research of hydrodynamic pressure and material removel were carried out based on cylindrical and grooved polishing tools using hydrodynamic suspension polishing system. In the hydrodynamic suspension polishing system, the lubricated parallel contact consisted of a high-speed rotating polishing tool and a workpiece. Using the CFD simulated the fluid between the polishing tool and the workpiece, the results showed that grooved polishing tool could effectively improve hydrodynamic slurry pressure during the polishing process, and the distribution of fluid velocity were similar. The machinability of hydrodynamic suspension polishing proved that the roughness and the material removal rate were better by the grooved polishing tool than cylindrical polishing tool in the same polishing condition; the roughness could low relative to 21 nm.